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Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*

Plasmatherm or similar Dual chamber PECVD RIE Reactive Ion Etch System *Parts*

$ 2639.47

Availability: 10 in stock
  • All returns accepted: Returns Accepted
  • Item must be returned within: 30 Days
  • MPN: PHA-500
  • Return shipping will be paid by: Buyer
  • Refund will be given as: Money Back
  • Restocking Fee: No
  • Condition: For parts or not working
  • Country/Region of Manufacture: United States
  • Brand: Unbranded

    Description

    Plasmatherm or similar manufacturer Dual chamber PECVD RIE Reactive Ion Etch System *Parts*
    Plasma Enhanced Chemical Vapor Deposition in left chamber, Reactive Ion Etching Plasma Etcher in right chamber
    For parts, not working, use for vacuum project.
    No vacuum pump included, some vacuum pipes and gate valves included (not shown).  Leybold Heraeus Turbovac 360 previously installed (please look on my listings, bundle pricing available).  Or use your own vacuum system.
    Includes:
    Pneumatic Chamber Hoists
    Advanced Energy ATX-600 RF Generator
    Advanced Energy RFX-600
    307 Granville-Phillips Vacuum Gauge Controller
    MKS Instruments Baratron Vacuum Gauge
    Tylan gate valves
    Numerous Vacuum General Tylan, and Brooks Mass Flow Controllers for N20, SiH4, He, CF4, ChF3, NH3, O2, Ar, SF6 gasses
    FREE Freight Shipping to be arraigned. Please contact for more photos or questions.